A 300 Hz 19 b DR capacitive accelerometer based on a versatile front end in a 5th-order DeltaSigma loop

Pastre, MarcKayal, MaherSchmid, HanspeterHuber, AlexanderZwahlen, PascalNguyen, Anne-MarieDong, Yufeng2016-04-062016-04-062009http://hdl.handle.net/11654/17674A 300 Hz 19 b DR capacitive accelerometer based on a versatile front end in a 5th-order DeltaSigma loop04B - Beitrag Konferenzschrift288-291