• DiSC 

      Fierz, Martin; Steigmeier, Peter; Houle, Corey Paul
      Many state-of-the-art aerosol measurement instruments of today are large, heavy and expensive; and therefore not well suited for field measurements. We have built a diffusion size classifier (DiSC), which trades the accuracy ...
    • Durchflusssensor 

      Neuhaus, Markus
      Flow measurements in processes like etching, cleaning, chemical mechanical polishing and coating in semiconductor manufacturing and chemical industries require high performance flowmeters. In pro-cesses like chemical ...