Nanostructured AlN SAW oscillator on CMOS for jitter-critical reference clocks

Abstract

This project develops a nanoscale surface acoustic wave (SAW) oscillator as a precision frequency reference for high‑speed digital systems. It uses Rayleigh‑mode SAWs in sub‑500 nm HiPIMS‑grown AlN films on CMOS‑compatible substrates, with sub‑micron electrodes to optimize acoustic confinement, coupling, and Q‑factor. FHNW supports chip sourcing, simulation, and characterization, while PSI/LNQ leads processing. The target is 156.25 MHz operation with <200 fs jitter, ±5 ppm drift, <1 mW power, and fast startup (<100 μs), enabling energy‑efficient clocking in AI and data‑center hardware. After validating low‑temperature AlN deposition, the oscillator will be fabricated and benchmarked toward a competitive Swiss timing product.