Nanostructured AlN SAW oscillator on CMOS for jitter-critical reference clocks
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DOI of the original publication
Project type
angewandte Forschung
Project start
01.01.2026
Project end
31.12.2027
Project status
laufend
Project contact
Project manager
Contributors
Description
Abstract
This project develops a nanoscale surface acoustic wave (SAW) oscillator as a precision frequency reference for high‑speed digital systems. It uses Rayleigh‑mode SAWs in sub‑500 nm HiPIMS‑grown AlN films on CMOS‑compatible substrates, with sub‑micron electrodes to optimize acoustic confinement, coupling, and Q‑factor.
FHNW supports chip sourcing, simulation, and characterization, while PSI/LNQ leads processing.
The target is 156.25 MHz operation with <200 fs jitter, ±5 ppm drift, <1 mW power, and fast startup (<100 μs), enabling energy‑efficient clocking in AI and data‑center hardware. After validating low‑temperature AlN deposition, the oscillator will be fabricated and benchmarked toward a competitive Swiss timing product.
Created during FHNW affiliation
Yes
Strategic action fields FHNW
School
Hochschule für Technik und Umwelt FHNW
Institute
Institut für Sensorik und Elektronik
Financed by
SNI Nano-Argovia
Project partner
Micro Crystal AG
Contracting authority
SAP reference
T456-0141-2
Keywords
SAW oscillator
HiPIMS‑grown AlN
HiPIMS‑grown AlN